SVG System Chosen for 300-mm Wafer Processing in Europe

An unnamed European DRAM chipmaker will install 300-mm thermal-processing machines from Silicon Valley Group (SVG, San Jose, Calif.) in one of its fabs, according to SVG. SVG expects to formally unveil its 300-mm rapid vertical processing system, the RVP-300, during the first quarter of 1998. The systems will be used for a variety of thin film applications in the manufacture of 64- and 256-megabit DRAMs.

According to Thermco division president Jeff Kowalski, the multiple-system order stems from the tool's advanced 300-mm production capabilities and a long-standing joint development program between the two companies. "As the industry transitions to 300-mm production, SVG continues to develop new processes and technology tailored to meet the unique requirements of each of our customers. As evidenced by the fact that we have shipped over 80 thermal processing tools to this fab alone, we have worked successfully with this customer in the past and are now prepared to address their demanding 300-mm production requirements," he says.

Based on SVG's advanced vertical processor (AVP) platform, the system combines advanced automation, high yield and process flexibility to handle a range of 300-mm thermal processing applications. The RVP-300 also features rapid temperature ramping for increased throughput, minibatch economics and model-based temperature control (MBTC), which provides advanced temperature uniformity and control.

"This order is particularly exciting, as we are among the first manufacturers to deliver a production-ready 300-mm thermal processing system to the industry. Equally relevant is that through years of working together, this key customer recognizes our ability to produce and comprehensively support products that are truly on the leading edge," says Kowalski. The result of a competitive bid situation, the order is scheduled to commence shipment in the first quarter of calendar 1998.

SVG manufacturers automated wafer processing equipment for the worldwide semiconductor industry. The company designs, manufactures, and markets equipment used in the primary stages of semiconductor manufacturing. Its products include photoresist processing equipment; oxidation, diffusion and low-pressure chemical vapor deposition processing systems; and photolithography exposure tools that use step-and-scan technology.