Surface Preparation System

Spectrum is a new generation surface preparation platform for high volume semiconductor manufacturing. Based on a fully automated, carrierless 50-wafer design, the Spectrum is offered in a one- or two-module architecture, with a compact footprint of 48 square feet for a single module model, and 76 square feet for a dual module model. The systems are configured for solvent or acid processes.

The system is designed for wet process applications from FEOL to BEOL, thus providing a common platform on which to perform all batch wafer-based wet processes. The Spectrum's process modules are self-contained, housing either spray or immersion process chambers, chemical mixing, filtration, and heating components- a design which results in considerable savings in clean room space. An additional benefit of the self-contained design is that the exhaust requirements are low, further reducing the cost of ownership. The system comes standard with the efficient company spin-rinse-dry technology or an optional surface tension effect dryer can be integrated. This flexible architecture allows the Spectrum to deliver a wide range of process capabilities.

Other features include a dynamically-controlled mini-environment that exceeds ISO Class 2 standards, remote option power distribution module, and high reliability automation that is platform specific. Spectrum automation is based on Yaskawa components assembled to the company's design requirements. The distinctive offset-shoulder, articulating feature of the robot allows the integration of an end effector cleaning station that does not require any additional footprint.

The Spectrum contains a compact WIP that is SMIF and AGV compatible which can store up to 300 wafers. One unique feature of the WIP is the ability to run hot lots without having to cycle through an entire WIP inventory.

Advanced closed-loop process and machine control enhances the system's monitoring capabilities and also interfaces to a SEMY Supervisor workstation. This combination provides features that include highly accurate chemical mixing, real-time flow and temperature control, and optional concentration monitoring. Additionally, the SEMY system provides real-time data logging, statistical process control, statistical machine control, predictive/preventive maintenance and scrap prevention.

The system also features the company's Smart Tool Architecture (STAR) which offers online manuals, future e-business connections and a host of other advanced features. The STAR package also includes advanced communication capabilities for interface with factory automation systems.

Applications for the Spectrum include: HydrOzone; photoresist strip; post-ash clean; polymer removal; pre-diffusion cleaning; ONO etch; and post CMP clean.

Semitool, 655 W. Reserve Dr., Kalispell, MT 59401. Tel: 406-752-2107.