Surface Mount Products
Source: Brooks Instrument, A Division of Emerson Electric Co.
Surface mount products feature reduced welds and less wetted surface area to eliminate potential process contamination
Brooks Instrument, A Division of Emerson Electric Co. mount products feature reduced welds and less wetted surface area to eliminate potential process contamination. The serviceability of gas systems with surface mount MFC's (mass flow controllers) make instrument replacement or process reconfigurations faster than traditional gas systems. The smaller footprint of these systems also help reduce costly cleanroom space.
The company is currently offering their surface mount products with the C-Seal (counterbore) design in compliance with proposed SEMI (Semiconductor Equipment Manufacturers International) Standard 2787.1.
Digital and analog models offered are the BrooksÔ 5850EM, 5851EM (Metal Seal Mass Flow Controllers), 5964, 5965 (High Performance All Metal Sealed Mass Flow Controllers) and the 6256 (Pure Digital SELECTÔ Mass Flow Controller).
<%=company%>, 407 W. Vine St., Hatfield, PA 19440-0903. Tel: 888-554-FLOW or 215-362-3700; Fax: 215-362-3745