Surface Conditioning System Platforms

FSI International, Inc.ed-footprint ZETA Surface Conditioning System platforms have been developed. The ZETA 200FE and 300FE Systems are targeted for clean and strip needs for front-end-of-line (FEOL) processing, a market in which FSI is the leader with over 30% market share. The ZETA 200BE and 300BE Systems, designed for back-end-of-line (BEOL) applications, are new configurations of FSI's production-proven ZETA platform and mark the company's entry into this segment of the semiconductor equipment market.

ZETA FE and BE System configurations are available fully automated for 200mm and 300mm manufacturing requirements or as 200mm semi-automated (manual load) systems.

The systems are based on high-mass-transfer centrifugal spray technology, which delivers process efficiency and performance in a small footprint. The systems' process efficiencies result in reduced chemical and water consumption, important factors for semiconductor manufacturers who are serious about minimizing environmental impact and reducing chemical costs. The tools offer a combination of features including a single, closed nitrogen-purged process chamber; temperature and flow-compensated chemical processing; and an on-board diagnostic system.

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