Substrate Heaters

The AJA International SHQ400-X Substrate Heaters deliver up to 2000 Watts of radiant heat to either a fixed or rotating substrate holder allowing substrates to reach temperatures of up to 850°C (rotating) / 950°C (fixed). Models are available for 2"- 8" diameter substrates. Standard substrate carriers also allow the heaters to accommodate a number of small samples

Each unit includes UHV compatible quartz halogen lamps, a water-cooled reflector box, dual "k type" thermocouples (substrate temperature and over-temperature protection), ceramic power connectors for lamps, dual vacuum feed-throughs (TC's, lamp power) and vacuum compatible wiring and tubing. Both HV and UHV versions are available. DC and/or RF biasing of the substrate are options for both fixed and rotating models.

Lamps can be powered by a variac for very basic applications. AJA International also offers the SHQ2000-C Programmable Heater Controller with integral power supply, RS-485 computer interface, PID substrate temperature controller, over-temperature controller with indicator lamp, lighted mains and lamp power switches, and all cables and connectors.

OPTIONS

Integral injection ring for reaction ion etching and sputtering process

RF/DC Biasing during rotation / deposition and heating

Motorized or manual UHV or HV Z-motion adjustment

Custom substrate carriers available

Custom engineering available upon request

Please contact AJA International for additional features and technical specifications.

AJA International, 809 Country Way, Box 246, N Scituate, MA 02060. Tel: 781-545-7365; Fax: 781-545-4105.