Stepper for Microelectromechanical/Microsystems Industry

Ultratech Stepper, Inc.odel 1600DSA stepper is designed for use within the microsystems industry for microelectromechanical (MEMS), micro-optoelectromechanical (MOEMS) or micromachining applications, and is equipped with dual-side alignment capability and bolsters.

Based on the 1X 1000-series product line, the fully automated Model 1600DSA offers 1.0- and 2.0-micron resolution lens options. Its high wafer plane irradiance enhances process throughput, especially for thick resists, while its low reticle costs contribute to the tool's low cost of ownership. The stepper is also equipped with a Machine Vision System (MVS) that offers flexible alignment capability. Most importantly, the system supplements the company's broad range of 1X and reduction steppers designed to meet the needs of the MEMS/microsystems market.

<%=company%>, 3050 Zanker Road, San Jose, CA 95134, Tel: (408) 321-8835, Fax: (408) 325-6444