Product/Service

Standard Pedestal Heaters

Source: Durex Industries Corporation
The standard pedestal heater manufactured by Durex is designed to provide a quick solution for wafer processing applications
The standard pedestal heater manufactured by Durex is designed to provide a quick solution for wafer processing applications. These heaters are designed specifically for 200mm and 300mm wafers. The standard design eliminates the need for costly tooling and mold design associated with new design custom heaters. They are ideal for research and development, rapid prototypes, and emergency repair requirements. A variety of options can be incorporated into the final product to customize the design for specific application requirements. These include a hard-anodized surface, lift pin holes, vacuum channels, and several electrical termination styles.