Sputtering System
Source: CHA Industries
CHA Industries has announced the availability of their SSC-1000 Sputtering System, which can be used for either sputter up or sputter down operation
CHA Industriesies has announced the availability of their SSC-1000 Sputtering System, which can be used for either sputter up or sputter down operation. The system features an automatic PLC/PC-based control system and an ergonomically designed process chamber for high operating efficiency.
The optional PLC/PC-based control system automatically controls each step in the air-to-air process, as well as provides a real-time, interactive flat panel display of system and process status. Visual and audible "pop up" screens keep the operator aware of system or process faults and include displays of suggested corrective action. The system computer employs the widely used Windows and Windows NT-based WonderWare and Seimens S-7 software, making operation of the system extremely user friendly.
The SSC-1000 is a multi-station, moving substrate system, configurable with up to four DC or RF round cathodes. System features include a single plane, multi-substrate rotating fixture and rotating shutter for predeposition and positive thickness cutoff control. The system utilizes 12-inch pumping stack components.
The optional PLC/PC-based control system automatically controls each step in the air-to-air process, as well as provides a real-time, interactive flat panel display of system and process status. Visual and audible "pop up" screens keep the operator aware of system or process faults and include displays of suggested corrective action. The system computer employs the widely used Windows and Windows NT-based WonderWare and Seimens S-7 software, making operation of the system extremely user friendly.
The SSC-1000 is a multi-station, moving substrate system, configurable with up to four DC or RF round cathodes. System features include a single plane, multi-substrate rotating fixture and rotating shutter for predeposition and positive thickness cutoff control. The system utilizes 12-inch pumping stack components.
<%=company%>, 4201 Business Center Drive, Fremont, CA 94538-6357, Tel: 510-683-8554, Fax: 510-683-3848
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