Spin Processor System
Source: Laurell Technologies Corporation
Manufactured using solid zero-porosity PTFE, the WS-500 Series Spin Processor System is suited for cleaning, etching, coating, and developing processes on wafers up to 200 mm
Laurell Technologies Corporationd using solid zero-porosity PTFE, the WS-500 Series Spin Processor System is suited for cleaning, etching, coating, and developing processes on wafers up to 200 mm. The CE Marked, S2-93 certified system features a locked, counter-balanced, clear domed chamber for a protected view of the process without exposure to vapors or chemicals. A PFA fluid path with an application specific array of adjustable liquid/gas injectors is standard. Twenty 50-step programs can be stored in the controller's non-volatile memory. Processes can be uploaded, downloaded, and monitored through the communication port using the company's SPIN2000 software.
<%=company%>, 121 Dickerson Road, Unit 8, North Wales, PA 19454-2537. Tel: 215-699-7278. Fax: 215-699-4311.
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