Spin-Processor

The 8200, a new Spin-Processor is a non-contact, single wafer, double sided cleaner available on the market that meets the requirements of next generation technology nodes. With a throughput of up to 200 wafers per hour, the tool offers the proven process capabilities of SEZ Spin-Processing, an alternative to conventional cleaning technologies. The tool has completed production worthiness evaluation and is now available for shipment.

A four-chamber tool, the new model is based on the company's Spin-Processor 4200, with an incorporated double-sided cleaning system. A single wafer tool, it is capable of immediate uniform coverage of the wafer and better end uniformity while using less chemistry than other systems performing pre-diffusion cleans. The tool also eliminates redeposition and cross-contamination because chemicals are spun off the wafer surface and the wafers are not touched during transport. Additionally, the system offers the same or better throughput than batch processing while eliminating water marks and residue contamination.

SEZ AG, Draubodenweg 29, Villach, , AT, 9500. Tel: +43 4242 204; Fax: +43 4242 204-21.