SpeedFam-IPEC

SpeedFam-IPEC will be featuring its line of leading dry wafer-in/dry wafer-out CMP planarization systems. The company's product solutions suites are used in critical IC interconnect schemes for advanced ASIC, Logic, DRAM and microprocessor devices with both integrated device and foundry manufacturers. The company's research and development efforts at its Technology Center provide advanced process application solutions for oxide, tungsten, copper and STI. At this year's show, SpeedFam-IPEC also will feature the introduction of its latest product offerings. These new products expand the company's product portfolio in both rotational and orbital planarization technology and will include new metrology and cleaning capabilities.

<%=company%>, 405 North 54th St., Chandler, AZ 85226, Tel: 480-961-1600, Fax: 480-705-2733