Spectrophotometer

Acton Research (Division of Roper Scientific), developer of 157nm and 193nm optical measurement systems, is pleased to introduce the new automated, high performance CAMS-507 DUV Spectrophotometer. The Acton Research CAMS-507 DUV provides precise reflectance, absorption and transmission measurements in the 120nm to >350nm wavelength range, with unsurpassed repeatability. This leading-edge system is designed to measure samples including CaF2, "dry" fused silica, deep UV optics, thin film coatings, photoresists and silicon wafers under vacuum or purged conditions.

The Acton Research CAMS-507-DUV is available with an option for measuring samples at 157nm or 193nm under polarized conditions, and is designed with semiconductor industry S2-93A standards in mind. Fully computerized, the system features, as standard, an automated 8-position
sample holder which can be positioned under operating conditions to change the measurement angle. The highly intuitive user interface has been optimized for both research and production environments.

Acton Research Deep UV Spectrophotometers, field-proven for over twenty years, have earned a stellar worldwide reputation for high quality and customer satisfaction. For further information please contact:

Roy Grayzel, Instrument Marketing Manager, Acton Research, Division of Roper Scientific, 530 Main St., Acton, MA 01720. Tel: 978-263-3584. Fax: 978-26.3-5086