Sonic Fog Technology
Source: AIO Corporation
Sonic Fog offers an alternative wafer drying technology that addresses contamination challenges commonly associated with current wet and dry processes
AIO CorporationEMICON West
Sonic Fog offers an alternative wafer drying technology that addresses contamination challenges commonly associated with current wet and dry processes. Sonic Fog is a liquid phase isopropyl alcohol (IPA) drying system that has been successfully used in the semiconductor, disk drive and flat panel display industries to completely dry substrates from 50 mm wafers to one meter square glass panels. The process uses room temperature liquid IPA and ultrasonics to achieve high levels of cleanliness and productivity.
<%=company%>, 48119 Warm Springs Blvd., Fremont, CA 94539, Tel: (510) 249-1310, ext. 3042, Fax: (510) 249-1319
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