Solvent Wafer Processor

The Evergreen Model 203 Solvent Processor is designed for applications in metal lift-off, flux removal, resist strip, polymer removal, solvent cleaning, and other solvent processes. This processor combines single wafer processing with batch immersion solvent processing. This versatile system is built to meet stringent requirements on ergonomics, safety, and chemistry economy and disposal.

Immersion processing in this processor, with agitation, heating, chemical recirculation, and multiple chemistry capability, provides for rapid batch processing. Single wafer spindle processing includes high pressure and megasonic scrubs for maximum effectiveness. Separation of IPA and DI water in the clean/rinse/dry chamber reduces chemistry usage, while increasing throughput per square foot. High speed robotics, with a laser scanner for precise positioning and handling, move wafers through the process, from dry-in to dry-out. A separate handler is dedicated to final, cleaned wafers.

Solid State Equipment Corporation, 185 Gibraltar Road, Horsham, PA 19044. Tel: 215-328-0700. Fax: 215-328-9410.