Solvent Processor

Solid State Equipment Corporationaning, developing metal lift-off, resist stripping, polymer removal, flux removal, and other solvent processes call for a versatile, precise system that meets stringent requirements on safety and chemistry disposal. The Evergreen Model 300 ML solvent processor meets these requirements in an automated system designed to minimize chemistry usage and disposal, and maximize operator convenience and safety. It features configurations to provide optimal solvent processing results on 300 mm wafers and square glass in a system that is compact and easy to use.

Processing is performed in an enclosed chamber equipped with up to four processing arms for maximum throughput and results. Depending upon user requirements, the Model 300 ML can provide automatic brush scrub, high pressure scrub, megasonic rinse, or a combination of processes. The processing module is fully sealed, with tamper-proof, interlocked exhaust monitoring.

Complete computer control of spray pressures, arm speeds, motion profile, and height, and chemistry temperatures provides both precision and flexibility to accommodate a wide range of solvent processes. Brush scrub with closed loop control of height and motion, high pressure spray, and megasonic rinse ensure effective material removal. Chemistries are contained in a fully enclosed distribution system. A Windows user interface maximizes operator ease-of-use. Features throughout the system maximize operator and environmental safety, meeting the constraints of SEMI S2-93 compliance for safety and ergonomics.

<%=company%>, 185 Gibraltar Rd., Horsham, PA 19044. Tel: 215-328-0700 Ext. 737. Fax: 215-328-9410.