Solvent Immersion & Single Wafer Processor

Solid State Equipment Corporationoff, resist stripping, polymer removal, flux removal, and other solvent processes call for a versatile, precise system that meets stringent requirements on ergonomics, safety, and chemistry disposal. The Evergreen Model 203 solvent processor meets these requirements in an automated system configured to minimize chemistry usage and disposal, and provide maximum operator convenience, safety and comfort. It combines the benefits of immersion and single wafer processing in a compact footprint.

Initial processing is performed in an immersion solvent bath, featuring mechanical agitation of the wafers in heated or ambient, fresh or recirculated, single or multiple solvents. Final processing is performed in single wafer spindle processors for rapid, high yield results. All processing modules are fully sealed, with tamper-proof, interlocked exhaust monitoring.

Complete computer control of spray pressures, arm speeds, motion profile, and height, and chemistry temperatures provides both precision and flexibility to accommodate a wide range of solvent processes. High pressure nozzles and Megasonic rinse ensure effective material removal. Chemistries are contained in a fully enclosed distribution system. Automatic loading cassette handlers and Windows user interface complete the picture by maximizing operator safety and ease-of-use- meeting the constraints of SEMI S2-93 compliance for safety and ergonomics.

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