SmartPower AX2500 Series Microwave Power Generator

SmartPower AX2500 Series intelligent microwave power generators build on ASTeX's experience in producing rugged, reliable microwave power generators for demanding semiconductor fabrication and industrial applications. The AX2500 design architecture incorporates the best of ASTeX field-proven technology, and combines new design features aimed at improved performance and lower cost of ownership.

The PrecisionPower technology (derived from ASTeX patented SmartMatch intelligent microwave matching unit) allows magnetrons to be replaced in the field resulting in substantially lower cost of ownership to the production user and improved accuracy of power control for process consistency.

The AX2500 series incorporates ASTeX SmartPower control technology, which monitors the generator's operating system and provides intelligent diagnostics. The simple messages, displayed on the SmartPower front panel, give the user all the information needed to understand system status and ensure maximum uptime.

N/A, 90 Industrial Way, Wilmington, MA 01887. Tel: 978-284-4000; Fax: 978-284-4999.