Product/Service

SMART-Station Automation Software

Asyst Technologies, Inc. announced that its subsidiary, Asyst Software Inc., has introduced SMART-Station automation software solution

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Asyst Technologies, Inc. announced that its subsidiary, Asyst Software Inc., has introduced SMART-Station automation software solution. Designed to fully automate the operation of fab processing and metrology equipment, SMART-Station provides the critical interface between shop-floor control systems and process and metrology tools on the factory floor. Combined with lot tracking systems, SMART-Station reduces processing mistakes and material losses in both SMIF and non-SMIF fabs by ensuring that the correct lot is processed by the proper equipment with the right recipe.

To achieve rapid, error-free processing of wafer lots, SMART-Station coordinates the manufacturing execution system (MES), fab equipment, SMIF interfaces, and Auto-ID system interfaces. SMART-Station automates the implementation of Standard Operating Procedures (SOP) at the tool. Differing from existing equipment automation solutions, SMART-Station features powerful workflow technology and distributed objects. Together these features speed the development and deployment of equipment automation solutions for the entire fab. As a result, equipment automation is removed from the critical path in ramping up a new fab or bringing new process technologies on line in an existing fab.

SMART-Station is also easily and rapidly configured for any fab and any process tool. Backed by an extensive library of completed tool interfaces, SMART-Station supports single-load, multi-load, and multiple SMIF configurations-with a single NT station capable of controlling multiple process or metrology tools. SMART-Station is also designed for compatibility with virtually all of the leading shop-floor control technologies, as well as custom/in-house MES systems. Asyst reports that SMART-Station is the latest addition to Asyst Software's SMART-Fab Suite, which also includes Asyst's SMART-Storage Manager and Global Lot Server. Together with SMART-Station, these software systems provide a scaleable solution for chipmakers' fab automation needs. SMART-Station is available now and is currently running production 24-hours-a-day, seven-days-a-week in multiple customer sites worldwide.

Asyst Technologies, Inc., 48761 Kato Rd., Fremont, CA 94538, Tel: 510-661-5000; Fax: 510-661-5166.