SMART-200 Semiconductor Micro-Analysis Review Tool

The SMART-200 is a whole-wafer Auger tool that was designed for small particle identification on 200 mm semiconductor wafers and read/write head substrates. Particle location maps from optical defect detection tools are imported and used to drive directly to defects of interest. Compared to EDX based Defect Review Tools (DRT) Auger Electron Spectroscopy (AES) based DRTs provide superior compositional metrology of small particles, because of the significantly smaller analysis volume of AES compared to EDX. The need for improved defect identification is highlighted by the SIA National Technology Roadmap which outlines the continually decreasing design rule and killer defect size. The SMART-200 utilizes manual sample handling for 200 mm wafers, read/write head substrates, and multiple small samples. An optional Focused Ion Beam (FIB) provides in-situ cross-sectioning of device structures and buried defects.

Physical Electronics, 6509 Flying Cloud Drive, Eden Prairie, MN 55344. Tel: 952-828-6100; Fax: 952-828-6322.