Product/Service

Slip Finder

Source: Hologenix
The Slip Finder is an automated wafer surface inspection system for the detection of crystal slip dislocation
Features:
  • Fully Automated Crystal Slip Detection
  • 150 and 200 mm Wafer Inspection
  • Dual Robot Design Provides High Throughput
  • Class 1 Clean Room Compatible
  • Submicron Optical Resolution with Telescopic Optics for Crystal Slip Detection
  • Adjustable Inspection and Slip Detection Recipes
  • SECSII/GEM Compliant Host Communication Software

The Slip Finder is an automated wafer surface inspection system for the detection of crystal slip dislocation. The system's high optical sensitivity eliminates the subjective and tedious visual and microscope inspection methods. It provides rapid 'hands-off' slip inspection for in-line monitoring and production.