Single Wafer Processor
It is a multi-chambered cluster tool which can be equipped with from one to ten Capsule process chambers, an can achieve a throughput of up to 180 wafers per hour. Each Capsule can process up to four chemical solutions in serial or parallel sequence. The system is available with one or two linear robots to increase throughput or for contamination control. The company's automation system includes edge-grip end-effectors to prevent contact with the processed side of the wafer. The system is also SMIF compatible.
The Capsule, a microenvironment in which the wafer is processed in dry-to-dry cycles, is unmatched. A unique aspect of the Capsule is single or dual side processing without the need to remove the wafer from the process chamber. Processes such as backside, edge, and bevel clean of metallic, organic, film, and particle contamination can be performed without processing the device side of the wafer. Front-side wafer processing can be performed simultaneously with the backside of the wafer. Additionally, the Capsule is self-cleaning, resulting in an ultra-clean process environment. Drying is performed by nitrogen or by the company'' spin-assisted low surface tension drying process.
The footprint of the Millennium is small, requiring only 26 square feet for a unit of up to six process chambers, and 35 square feet for a unit with up to ten process chambers. There are no external chemical supply modules needed, as the compact unit contains the handling, mixing, and distribution system for all chemicals used in the process.
Incorporated in the control system is the company's Smart Tool Architecture (STAR). The advanced STAR system offers such features as statistical process control, predictive maintenance, online manuals, and a host of other advanced features.
Applications for the Millennium include backside, edge, and bevel clean, backside film removal, pre-litho clean, pre-epi clean, post-cmp clean, and polymer removal. The system is available with immersion, spray and vapor process capability.
Semitool, 655 W. Reserve Dr., Kalispell, MT 59901. Tel: 406-752-2107.