Single Plane Air-Bearing X-Y Stages

The Dover Triathlon Series Stages are designed to provide the highest performance of any air-bearing stage available today. The Triathlon Series stages are available in two standard travel lengths, 350mm x 350mm and 900mm x 900mm, and can also be customized with different travel lengths to suit your specific application. The Triathlon Series unique design combines precision air-bearing ways, non-contact linear servo motor drives, high-resolution encoder or laser interferometer feedback, and advanced DSP-based motion control. The result is a clean, maintenance-free system that provides high precision, high throughput, and extremely straight and smooth motion. In this unique design, both the X and Y axes are vertically referenced directly to a granite base plate, which is lapped to extremely high levels of flatness.

Dover's Triathlon Series Stage offers several advantages over the competition, including:

• Longer travel capability without any compromise in performance.
• Superior pitch angle error and flatness of travel, due to direct coupling of the air bearing stage to the lapped granite base plate.
• Dover's exclusive Active-Yaw Rotation Axis Technology - Improved yaw angle error and horizontal straightness due to active dynamic yaw and straightness correction capability.
• Higher dynamic stiffness
• Very low profile
• High load capacity

Dover Instrument Corporation, 200 Flanders Road, P.O. Box 200, Westboro, MA, 01581-0200. Phone: 508-366-1456; Fax: 508-366-9774.