Silicon Valley Group: Pulling the Pieces Together
At first glance, the three divisions of Silicon Valley Group (SVG; San Jose, CA) don't seem to have much in common. There's the Lithography Division, with one of the industry's first deep ultraviolet (DUV; 248 nm) step-and-scan systems. There's the Track Systems Division: while resist processing and lithography certainly go together in the fab, the technologies are quite different. And, finally, there's the Thermco Division, focused on the completely different world of oxidation, diffusion, and low pressure CVD.
John Shamaly, recently appointed vice president of marketing for the company (See related article), agrees. Strategic planning is one of his primary responsibilities, and one of his first goals is tying the market presence and development efforts of the three divisions together.
John Shamaly, SVG's new vice president of marketing
For example, lithography customers are a natural market for the company's track systems. Shamaly expects 300 mm tools from these divisions to work together more closely than current tools do. As the Thermco Division has already shipped 300 mm furnaces, the other two divisions should also be able to leverage those development efforts.
In his previous position as vice president, technology and marketing for the Lithography Division, Shamaly had a chance to watch the emergence of DUV step-and-scan tools. As i-line systems begin to reach their limits, he told Semiconductor Online, DUV tools will be needed for sub-critical layers as well. SVG has a larger share of the DUV market than it does in i-line, so DUV growth should boost the company's overall lithography share.
Shamaly expects optical lithography to remain viable for longer than the industry expects. Phase shift masks and optimized pupil functions will extend the reach of the company's Micrascan III DUV system. Similar optimizations should extend 193 nm lithography as well. Shamaly predicts 193 nm systems will begin shipping in 1999, and will gain sales as the 150 nm generation arrives in 2000-2002. Still, he remains concerned about the sub-100 nm outlook. SVG, through its lens-making subsidiary, Tinsley Laboratories (Richmond, CA), has signed a development agreement with the EUV LLC (Santa Clara, CA), but Shamaly expects extreme ultraviolet EUV to be a longer term solution. The company is also interested in Lucent Technologies' (Murray Hill, NJ) SCALPEL technology. (See Glossary)
On other strategic planning fronts, Shamaly hopes to focus technology and marketing efforts on "helping our customers win." He plans to introduce incentives throughout the customer service chain, from service technicians to cycle time reduction and reliability improvements.
By Katherine Derbyshire
For more information: Silicon Valley Group, 101 Metro Drive, Ste 400, San Jose, CA 95110. Tel: 408-441-6700; Fax: 408-467-5819.
Glossary
SCALPEL: scattering with angular limitation projection electron-beam lithography, an advanced lithography technology developed and supported by Lucent Technologies' Bell Labs (Murray Hill, NJ).
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