Silicon on Glass: C-SiOG

SOITEC has successfully developed proprietary process technologies to create a thin monocrystalline film of silicon on quartz or glass wafers. The process produces wafers with electrical characteristics superior to polysilicon films. Wafers with a monocrystalline film of silicon-on-quartz or glass are used for manufacturing liquid crystal displays (LCDs) of small dimension and high resolution, a process which has traditionally used polysilicon. Drivers can be processed on the same wafers, making the connections of the thin-film transistor (TFT) matrix easier. Applications include thin-film transistor liquid crystal displays (TFT-LCDs), charge coupled device (CCD) detectors, virtual reality devices and high definition television (HDTV) projection systems.

Field of applications:

TFT LCD applications for TV projection systems.

Virtual reality glasses or military applications.

CCD detectors.

Main advantages compared to polycrystalline silicon on glass:

For TFT LCD projection single-valve systems or small FPDs

Low leakage current for the TFT.

5 X higher mobility.

Low threshold voltage Þ low voltage displays.

High resolution due to smaller TFT - high brightness.

Integration of CMOS drivers on the quartz wafer is easier - that means a drastic reduction of connectors on the small displays.

For CCD detectors

Better blue detection due to back side illumination through the glass wafer.

SOITEC USA Inc., 2 Centennial Drive, Peabody, MA 01960. Tel: 978-5312222; Fax: 978-531-2758.