Product/Service

Silicon Carbide Furnace Components

Source: Asahi Glass Electronic Materials
AGEM offers a full line of high-purity recrystallized & CVD-Coated silicon carbide furnace components marketed under the trade name Roiceram-HS.
AGEM offers a full line of high-purity recrystallized & CVD-Coated silicon carbide furnace components marketed under the trade name Roiceram-HS. Our SiC materials are preferred by wafer fabs and furnace manufacturers worldwide where processes demand the highest purity combined with dimensional precision and an overall lower cost of ownership.

At AGEM, we're committed to process improvement. Our focus on "technical solutions" means that not only can we provide the highest quality materials for your most demanding applications, but we also understand the impact of cost, lead time, performance, maintainability, and durability of our product.

Vertical Boats
Pedestals
Liners
Tubes
Baffle Plates
Susceptors
Horizontal Boats
Process Tubes
Cantilevers
Thermocouple Tubes
Injectors
Alignment Bars
Pins
• Aegis Wafers
• Single Wafer Process Components
Custom Design