Product/Service

S600 Series: Parametric Test System

Source: Keithley Instruments, Inc.
The S680 is designed for sensitive high speed testing. The measurement instruments are located in the system cabinet, while the preamplifiers are located in the test head. The preamplification technology used boosts low level signals within centimeters of the probe needles, then transmits the boosted signals over cables to the measurement instruments in the system cabinet. This approach eliminates the speed and sensitivity losses that typically result from cable and switch matrix effects

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Product Overview: S680 DC/RF Parametric Test System
Datasheet: S680 DC/RF Parametric Test System

The S600 Series parametric test platform on which the S680 is based is flexible and extendable, providing industry leading measurement capabilities for today, as well as for future technology generations. This flexible architecture ensures that, no matter what tomorrow's devices look like or how they perform, you'll be able to upgrade or reconfigure your tester cost-effectively to handle them. In fact, our design team is already at work on solving the parametric test challenges you'll face with the next two generations of devices.

We back up the S680 with a full staff of parametric test experts, who not only understand the physics of new materials and devices, but lead the industry in their knowledge of electrical test instrumentation and test setup. They'll work closely with you to develop new measurement capabilities as new test needs emerge, so you can meet your process development and process ramp goals.

Keithley can build an S680 tester optimized for your emerging parametric test requirements, including:

  • Advanced transistor gate dielectrics.
  • RF s-parameter measurements at up to 40 GHz for high performance BiCMOS processes.
  • Copper/low k materials systems.
  • Embedded memories, such as ferroelectric and magnetic-based devices.
  • Measurements on advanced substrates like SOI and SiGe.
  • Femtoamp-level DC measurements for low leakage mobile devices.
  • Adaptive and parallel testing for improved throughput and reduced cost of test.

Keithley's parametric test systems with Linux controllers join the growing list of semiconductor equipment types that now utilize the Linux OS. With its RF and parallel test options and appropriately designed test structures and probe cards, the Model S680 is the only RF test system on the market that can make simultaneous DC and RF measurements in parallel within the same probe touchdown. This yields substantially higher throughput than similar methods that perform sequential DC measurements followed by RF measurements.

Compatibility. The Model S680 system using the new Linux controller will be compatible on a mixed system test floor. For customers who prefer a 100 percent Linux test floor, field upgrades are available. In any case, a newly installed Linux controller will operate seamlessly with existing parametric test systems operating under Solaris. For example:

  • Recipes – Format and content are the same for those using Keithley Recipe Manager.
  • User Library Source Code – The same source files are usable on the new platform.
  • KTXE – Both platforms use the same engine.

Those purchasing Keithley's new S600 Series systems will get the latest software version, KTE V5.2.2, which is also available as a field upgrade. The new systems will have Red Hat Enterprise Linux WS Version 4, Update 4, and a new x86-based computer. Aside from the RF and parallel test options, these systems can also be purchased with the adaptive test option and 300mm wafer automation option. Because the GUI is similar to that in earlier systems, minimal, if any, additional operator training is needed.

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Product Overview: S680 DC/RF Parametric Test System
Datasheet: S680 DC/RF Parametric Test System