SEZ AG Selects MKS Dissolved Ozone Systems For Single Wafer Processors

Wilmington, MA - MKS Instruments, Inc. the provider of process control technologies for improving productivity in semiconductor and other advanced manufacturing processes, has announced that SEZ AG, one of the leader in single wafer technology, has selected MKS' LIQUOZON LoopO₃ dissolved ozone systems for its next generation single wafer processors. The MKS generators were chosen because of their compact size, modular design and unique ability to precisely deliver ultra pure ozonated water for cleaning processes.

"By using ozonated water as the cleaning agent, the LIQUOZON LoopO₃ offers an environmentally friendly alternative to existing semiconductor cleaning technologies," said Dr. Christiane Gottschalk, Senior Manager of Sales and Customer Service for ozone products with the MKS Power and Reactive Gas Products Group. "It's cost effective, too. Its point-of-use generation of ultra pure ozonated water and the ease of conversion of ozone back to oxygen greatly reduce costs for buying, storing and disposal of cleaning chemicals."

The ultra-compact, stand-alone LIQUOZON LoopO₃ system is the most compact source for wet wafer processing with ozone including a pump for the recirculation loop. It features fast cycle times and up to 10 L/min of DIO₃ at ozone concentrations up to 62 ppm, ideal specifications for low flow, single wafer applications such as organic clean, water mark removal and oxide growth. It also features closed-loop concentration control and DI water recirculation for fast response to changing flow requirements and significant water savings. These features maintain constant ozone concentration and operating pressure, assuring process repeatability at varying flow rates. The system's unique recirculation system that results in zero UPW consumption during idle, its MTBF of > 20,000 hours and its ability to serve multiple process chambers combine to significantly reduce the cost of ownership.

Other DIO₃ delivery systems in the MKS LIQUOZON product family include the LIQUOZON Single, LIQUOZON Smart, LIQUOZON 100, and the LIQUOZON XF.

SOURCE: MKS Instruments, Inc.