SensArray Launches Thermal Track/TC Tool for In Situ Wafer Temperature Measurement

The wafer temperature data logging and monitoring technology of SensArray Corporation's (Santa Clara, CA) Thermal Track hand-held maintenance and troubleshooting product line is now available for use with Process Probe thermocouple-instrumented wafers. Designed for CVD and RTP process tools, the new Thermal Track/TC logs thermocouple temperature data in real time from an array of up to 17 sensors embedded in wafers to provide direct in situ wafer temperature measurement.

Key applications for Thermal Track/TC include: checking and adjusting pyrometer calibrations, immediate troubleshooting for temperature-related process problems, and running predefined preventive maintenance checks tailored to customer equipment configurations. Data can be transferred to spreadsheets or to SensArray's Thermal Map 2 data analysis system.

The Thermal Track/TC display shows a wafer image with digital temperature indicators at each sensor location and calculates minimum, maximum, and average temperature. Acquisition periods are user-defined from 200 milliseconds to 5 minutes, depending on the nature of the application. Data storage capacity can be expanded by plugging in a RAM card for 16M or more additional storage space.

SensArray Corporation, 3410 Garrett Drive, Santa Clara, CA 95054, Tel: 408-727-4656; Fax: 408-496- 6929.