Semy Engineering, Inc.

Advanced Run-to-Run Control creates a closed loop system incorporating SEMY's Supervisory System and additional metrology tools. Based on the physical measurements derived from the metrology tools, user selected process parameters are automatically modified to keep the process centered. This application can be used to control a single step in the process, using a feedback technique or it can automatically adjust a subsequent step, based on the results of a previous step, using a feed forward technique.

Semy Engineering, Inc., 2340 West Shangri La, Suite 201, Phoenix, AZ 85029-4747. Tel: 602-861-9395; Fax: 602-861-1442.