Semozon AX8400 Series of Ozone Generators

Semozon AX8400 series is a family of compact, high concentration, ultra-clean ozone generators uniquely suited for use in semiconductor fabrication. Ozone is an environmentally friendly alternative to many chemical processes. It has a high redox potential, can be generated at the point of use and is easily converted back to oxygen. Typical ozone applications include TEOS/Ozone CVD, Ta₂O₅ CVD, photoresist strip, wafer cleaning, contaminant removal and surface conditioning, and oxide growth.

The Semozon AX8400 series is an extension of the patented cell technology and production-proven design of the ASTeX AX8000 series generators, an industry standard in ozone production. The Semozon AX8400 series ozone generators feature a high purity oxygen feed gas, ppm levels of dopant gas, all welded construction, high purity wetted materials, innovative cooling design, and compact size. The result is high concentration, high purity ozone.

Advantages

• Highest ozone concentration and flow for high rate processes
• Extremely low levels of dopant gas for ultra clean ozone
• Environmentally friendly alternative to process chemicals
• No consumables, no preventive maintenance for low cost of ownership
• Patented, welded cells with advanced cooling for high concentration and low contamination
• CE, ETL and CSA compliant

N/A, 90 Industrial Way, Wilmington, MA 01887. Tel: 978-284-4000; Fax: 978-284-4999.