Semozon 250.3 Ozone Delivery System

The Semozon 250.3 ozone system is a high concentration, high flow, ultra-clean and compact ozone generation and delivery system designed specifically for ozone applications in semiconductor fabrication.

Ozone is an environmentally friendly alternative to many semiconductor process chemicals. It has a high redox potential, can be generated at the point of use and is easily converted back to oxygen. Typical ozone applications include TEOS/Ozone CVD, Ta₂O₅ CVD, photoresist strip, wafer cleaning, contaminant removal, surface conditioning, and oxide growth.

The Semozon 250.3 system process plumbing is made of electropolished stainless steel and is factory leak tested to insure performance and reliability. Other features include real time, closed-loop concentration monitoring and control, status monitoring and microprocessor controlled tool interface. Systems are S2-93 and CE compliant and are safety and performance interlocked for rack exhaust, water flow, water leak and open doors/panels.

• High concentration ozone
• Ultra pure, semiconductor-quality ozone
• Closed-loop concentration control
• Real time status monitoring and tool interface
• Safety and performance interlocked
• Compact footprint
• High reliability, production proven
• Agency approvals including CE Mark and S2-93
• Environmentally friendly alternative to many process chemicals

N/A, 90 Industrial Way, Wilmington, MA 01887. Tel: 978-284-4000; Fax: 978-284-4999.