Semiconductor

POCO has been a supplier to the semiconductor industry for more than 25 years. Products include APCVD wafer carriers, E-Beam crucibles, heaters (small and large), ion implanter parts, LTO injector tubes, MOCVD susceptors, PECVD wafer trays and disk boats, plasma etch electrodes, quartz replacement parts, sealing plates, bonding fixtures, and sputtering targets. POCO has a wide range of materials, post-processing and machining capabilities to meet Fab requirements.

To keep pace with the semiconductor industry's demand for materials suitable for high temperature applications, POCO acquired the technology to convert graphite into silicon carbide. The silicon carbide product line includes horizontal and vertical wafer carriers and dummy SiC wafers. Of the four major sources for semiconductor grade SiC, POCO is the only manufacturer using the graphite-SiC conversion production method. Because these parts are machined from graphite prior to conversion, the production process is much shorter and less costly than cast silicon carbide parts. POCO's silicon carbide is stoichiometrically correct, high purity SiC.

POCO Specialty Materials, Semiconductor Products Group, 1601 South State Street, Decatur, TX 76234. Tel: 940-393-4471; Fax: 940-393-8366.