SEMI International Standards

The 17 new and 23 revised SEMI International Standards for the semiconductor and flat panel display manufacturing industries are part of an eleven-volume set of standards, which has long served as the chief resource of manufacturing guidelines for the semiconductor and flat panel display industries worldwide. The volumes affected by these new and revised documents include: equipment automation/hardware, equipment Automation/Software, Facilities and Safety, 300 mm, Flat Panel Display, Gases, Materials, Microlithography, Packaging, Process Chemicals, and Traceability.

Highlights of the new and revised documents include the Guide for 300 mm Process Tool Points of Connection to Facilities Services (SEMI E76-0998), which clarifies a number of issues related to the installation of semiconductor manufacturing equipment. Acknowledging that there is more to building a fab than physical installation of equipment, SEMI E-76 addresses the entire process, from procurement to installation, and serves as a guide for doing so in a cost- and time-effective manner. This document may be found in the Equipment Automation/Hardware, the Facilities and Safety, and the 300-mm volumes.

Changes in lithography technology are addressed by SEMI P33, a specification for the development of 230-mm reticles, the next-generation reticle size for semiconductor lithography. The standards specified by SEMI P33 will assist in the research and development of new lithography equipment and materials.

Semiconductor Equipment and Materials International, Contact: Mike Droeger, 650-940-6953; Fax: 650-940-7932.