Semi-Automated Valve Manifold Box

iCon has developed a semi-automated valve manifold box (VMB) for semiconductor UHP specialty gas delivery. This VMB is designed to provide a safe, high purity, and economical means of supplying up to eight points of use from a single hazardous gas supply line. Its automated functions safely distribute, shut off, evacuate, and purge distribution branches individually or collectively, depending on operating and alarm conditions. It is specifically configured to enable the activation or deactivation of any branch without affecting the status of any other branch in the VMB. All valves, and associated components are housed within an exhausted enclosure, and they are locally controlled by a microprocessor-based control system.

iCon Dynamics, LLC, 54 Cedar Heights Road, Rhinebeck, NY 12572. Tel: 914-876-0296; Fax: 914-876-0298.