SEM Sample Aligner

The PreSet system is designed for cross-section sample prealignment for critical dimension measurements by field emission scanning electron microscopes (FE-SEMs). The system allows 90-deg. alignment of the sample to the electron beam prior to insertion into the SEM for accuracy and prevention of the edge-blooming effect in edge-on SEM images. The system can be adapted to SEMs with limited sample rotation capabilities.

Surface Interface, Inc., 260 Santa Ana Court, Sunnyvale, CA 94086-4512. Phone: 408-732-7111; FAX: 408-732-7191.