Self-Metering Reservoir
Source: iCon Dynamics, LLC
The (Self-Metering Reservoir) SMR is a patented, compact, steady state vapor generator, capable of supplying a very uniform, ultra-pure, vapor to CVD, Diffusion, EPI, and other processes
The (Self-Metering Reservoir) SMR is a patented, compact, steady state vapor generator, capable of supplying a very uniform, ultra-pure, vapor to CVD, Diffusion, EPI, and other processes. The SMR can be configured as a bubbler or as a liquid evaporator. The SMR requires no liquid refill control electronics to replenish itself in real time, and it maintains a constant liquid level during operation. The SMR meters fluid into itself as vapor is extracted from it. This simple, yet unique approach offers significant benefits ranging from improved yield, greater availability, lower capital cost, and reduced waste.
The Self-Metering Reservoir consists of two vessels, one floating inside the other. Fluid enters through the base of the outer vessel, floating the inner vessel. As the liquid reaches the top of the inner vessel, it cascades in, increasing that vessel's weight and reducing its buoyancy. As the inner vessel loses buoyancy, it floats lower in the outer vessel, causing a metering stem on the inner vessel's base to restrict the flow of liquid into the outer vessel. As liquid bubbles out, the inner vessel becomes buoyant again, letting in more liquid. Consequently, liquid is replaced at the same rate at which it is removed.
iCon Dynamics, LLC, 54 Cedar Heights Road, Rhinebeck, NY 12572. Tel: 914-876-0296; Fax: 914-876-0298.