SEC-600 & SE-600 Systems
Source: CHA Industries
The SE-600's 6-inch, high-speed diffusion pump delivers a pumping speed of 2400 l/s
SE Series High-Vacuum Disposition Systems
The SE-600's 6-inch, high-speed diffusion pump delivers a pumping speed of 2400 l/s. Like all SE-Series systems, the baseplate (20 or 26 inches) accommodates up to 20 feedthroughs for instrumentation, control and rotary motion. SE-600 systems are typically equipped with a 19.5-inch bell jar and planetary fixturing having a capacity of 18 4-inch wafers. The average cycle time of 20 minutes allows throughput in excess of 54 wafers per hour.
CHA Industries, 4201 Business Center Drive, Fremont, CA 94538-6357. Tel: 510-683-8554; Fax: 510-683-3848.