SEC-1000 & SE-1000 Systems
Source: CHA Industries
The largest of the SE-Series, the SE-1000 has a 10-inch diffusion pump rated at 5300 l/s, and is typically equipped
SE Series High-Vacuum Disposition Systems
The largest of the SE-Series, the SE-1000 has a 10-inch diffusion pump rated at 5300 l/s, and is typically equipped with a 25.5-inch, water-cooled bell jar and a 26-inch diameter stainless steel baseplate. With planetary fixturing holding up to 57 4-inch wafers and an average air-to-air cycle time of 20 minutes, the SE-1000 can process up to 175 wafers per hour. One button control and dual ion gauges are among the most popular options added to the system.
CHA Industries, 4201 Business Center Drive, Fremont, CA 94538-6357. Tel: 510-683-8554; Fax: 510-683-3848.