Scepter Rinser Dryer
Source: Semitool, Inc.
The Scepter Rinser Dryer, offers a doubled capacity chamber which is easily accessible and meets the S8-99 ergonomic load height guidelines
Semitool, Inc.cepter Rinser Dryer, offers a doubled capacity chamber which is easily accessible and meets the S8-99 ergonomic load height guidelines. The dryer features centrifugal drying, coupled with heated, filtered nitrogen and a low-pressure nitrogen purge, for a clean and dry final product. The process chamber is rinsed along with the product, eliminating secondary contamination. The system features the combination of multiple nozzle spray technology, an electropolished stainless steel process chamber, brushless DC drive motor, non-contact bowl seal, dampened actuation valves, and a static-reduction system.
The on-axis orientation of the dryer keeps wafers parallel, and allows the de-ionized water manifold to spray both sides of all wafers continuously and simultaneously. The chamber/rotor design and enhanced fluid delivery system are designed to assure uniform coverage.
<%=company%>, 655 West Reserve Drive, Kalispell, MT 59901. Tel: 406-752-2107; Fax: 406-752-5522