Scanning-Electron Microscope
Source: KLA-Tencor
The 8100XP-R is a critical dimension scanning-electron microscope designed to address the metrology challenges for low k1 lithography and 018 micron and beyond technologies
The 8100XP-R is a critical dimension scanning-electron microscope designed to address the metrology challenges for low k1 lithography and 018 micron and beyond technologies. It can measure both reticles and wafers without requiring any hardware or software changeover. This microscope facilitates image transfer and defect printability studies and enables customers to optimize pattern transfer for the highest possible productivity and yields.
KLA-Tencor, One Technology Drive, Milpitas, CA 95035. Tel: 408-875-4200. Fax: 408-434-4276.