Sapphire Wafers

The company offers Ultraflat sapphire wafers that are ideal suited as base plates for mounting substrates in the manufacturing of semiconductor devices.

The Ultraflat Sapphire Wafers feature flatness to 0.5 fringes of HeNe and parallelism from 20 seconds to 1 second with ± 1.2 microns piece-to-piece uniformity. Impervious to caustic etching agents, these carrier discs permit total thin film processing and are offered in 50 mm to 82 mm dia. sizes with thicknesses from 0.5 mm to 3 mm and tolerances to ± 0.5 mm.

Suitable for mounting, lapping, polishing, etching, and the final dicing of GaAs, Si, and other materials, the wafers are transparent in the IR and easily fit most photo aligners. Clear, hard, and chemical-resistant, they can be polished on one-or both sides to surface finishes approaching scratch-free at 70x magnification.

Meller Optics, Inc., 120 Corliss St., P.O. Box 6001, Providence, RI 02940. Tel: 800-821-0180 or 401-331-3717. Fax: 401-331-0519.