Samsung SDI Chooses LIQUOZON® Dissolved Ozone System For OLED Manufacturing

Wilmington, MA - MKS Instruments, Inc., a provider of process control technologies for improving productivity in semiconductor and other advanced manufacturing processes, has announced that Samsung SDI, has selected MKS' LIQUOZON® dissolved ozone systems for its next generation Organic Light Emitting Diode (OLED) production. According to MKS, their generators were chosen because of their compact size, modular design and unique ability to precisely deliver ultra pure ozonated water for cleaning processes.

"The flat panel display industry faces challenges similar to those of the semiconductor industry. Conventional cleaning methods, with their costly issues of toxic chemical storage, handling, consumption and disposal, pose major problems for manufacturers," said Dr. Christiane Gottschalk, Senior Manager of Sales and Customer Service for ozone products with the MKS Power and Reactive Gas Products Group. "By using ozonated water as the cleaning agent, the LIQUOZON Single system offers a clean, safe alternative with no compromise in process performance or reliability, and significant reductions in waste disposal costs. With such cost and process benefits, ozone delivery systems are gaining wide acceptance in semiconductor and flat panel applications including wet wafer cleaning, contaminant removal and surface conditioning."

MKS sources added that the self-contained LIQUOZON® Single system generates ultra-pure ozonated water at the point of use, eliminating the need for chemical storage. The system does not generate NOx, a source of contamination and possible chemical attack on metal piping. It delivers exceptionally accurate and high dissolved ozone concentrations (up to 95 ppm), and its closed loop control ensures delivery at stable concentrations, even at varying flow rates. (It is designed and optimized for 0.5 to 20 liters/minute.)

Other ozonated-water delivery systems in the MKS LIQUOZON® product family include LIQUOZON® LoopO3, the stronger DIO3 systems LIQUOZON® Smart and LIQUOZON® 100, and the LIQUOZON® XF, designed for both cleaning and resist removal in wet applications.

SOURCE: MKS Instruments, Inc.