Safe Delivery Source
Source: Matheson Electronic Products Group
SDS, safe delivery source, is a product designed for ion implantation utilizing Germanium Tetrafluoride (GeF4)
SDS, safe delivery source, is a product designed for ion implantation utilizing Germanium Tetrafluoride (GeF4). The delivery source cylinders allow users the equipment flexibility of a gas source with the safety and performance of a solid source, according to the company. Using dopant gases at sub-atmospheric pressure, it delivers gas based on the pressure differential between the cylinder and the ion source region of the implanter.
The GeF4 product is available in two sizes: WY cylinders (0.4 liters) and JY cylinders (2.2 liters). This product allows ultra-shallow junction formation for 180nm design rules.
Matheson Electronic Products Group, 625 Wool Creek Dr. #A, San Jose, CA 95112. Phone: (408) 971-6500.
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