RTP Products

STEAG Electronic Systems offers products for rapid thermal processing (RTP), clean process, CVD and post-CMP-cleaning. The AST 3000 RTP system, an advanced 200 mm/300 mm RTP tool designed for 0.18 micron to 0.10 micron applications is the only RTP tool capable of spike anneals with ramp rates over 300 degrees Celsius/sec.

STEAG's STEAMpulse, is a RTP system for applications such as high-temperature thin and thick oxides, post-dielectric deposition anneals, selective oxidation and low-temperature copper anneals. The STEAMpulse is the only steam-based RTP tool capable of providing low steam concentrations in a hydrogen-rich environment.

The Poseidon Double Tank Tool (DTT) is designed for critical cleaning steps such as pre-gate oxidation, pre-epi and pre-furnace/RTP. The Poseidon DTT offers significant process flexibility and an excellent throughput-to-footprint ratio, ultimately reducing CoO.

STEAG AST Elektronik, U.S.A., Inc., 7755 S. Research Dr., Tempe, AZ 85284. Tel: 602-777-0021. Fax. 602-777-0025.