Product/Service

RF Generators

Source: Comdel, Inc.
A series of RF generators features S-technology, a stabilizing technology that reduces the interaction of the plasma chamber-matching network load with the generator
Comdel, Inc. RF generators features S-technology, a stabilizing technology that reduces the interaction of the plasma chamber-matching network load with the generator. This eliminates the oscillations that may occur during process tune-in or whenever process conditions change. This enhancement was engineered to offer increased stability in order to reduce process development time, improve process repeatability, and increase the life of the matching network and the RF generator.

<%=company%>, 11 Kondelin Rd, Gloucester, MA 01930. Tel: 978-282-0620. Fax: 978-282-4980.