Reticle Management and Tracking System

Brooks AutomationTrax software solution is a comprehensive reticle management and tracking system that manages reticles and reticle families and tracks the location and usage for each reticle in the fab. ReticleTrax improves fab efficiency and productivity through the elimination of misplaced reticles, shorter reticle search times, and automated reticle inspection/clean cycles.

ReticleTrax is integrated with the fab's MES, Material Control System (MCS), ID system, and Cell Controller in order to track the status and fab location of individual reticles, reticle families, and empty pods.

The systems's web-based user interface allows the user to perform reticle management and tracking from inside and outside of the fab using a web browser. A history is kept for each reticle by recording all reticle events for the entire life of a reticle from introduction to the fab until it is scrapped. Brooks Automation usage history enables automated triggers to be set according to the customer's specific business rules.

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