Reticle Defect Review Interface
Source: Leica Microsystems Inc.
A Reticle Defect Review Interface allows users of Leica's LWM250 series of reticle CD metrology systems
Leica Microsystems Inc.efect Review Interface, developed in conjunction with Lasertec Corp., allows users of Leica's LWM250 series of reticle CD metrology systems to review defects on photomasks/reticles that have been detected on Lasertec´s 9MD series of automatic photomask/reticle inspection systems.
A software link between the Leica LWM and the Lasertec 9MD systems automatically transfers the defect data onto the Leica LWM250 system. A user-friendly software then enables the review of each single defect by automatically placing the defect in the center of view of Leica´s CD inspection system. Using white light and UV optics, defects down to less than 0.2µ can be easily classified and a decision can be made as to whether these defects impact the photomask quality in such a manner that a rework or repair is necessary.
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