Real Time Analyzer (RTA) for Copper Damascene
Source: Technic Inc., SemiConductor Division
Technic's RTA is an automated, on-line, and in-tank process control system for monitoring electroplating processes
Technic Inc., SemiConductor DivisionTA is an automated, on-line, and in-tank process control system for monitoring electroplating processes. RTA analytical techniques are based on patented electrochemical technology utilizing AC and DC voltammetry. The RTA precisely controls all critical components in copper Damascene electrodeposition to ensure high reliability manufacturing. Specific applications are immediately available to support commercial processes from Enthone OMI, Shipley Ronal and Technic. The RTA is the most advanced process control technology for copper electrodeposition available in today's market.
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