QCS-7000 Series Epitaxial Process Control System
The QCS-7000 Series System with proprietary Surface Charge Profiler (SCP) technology provides exceptional advantages over traditional C-V techniques for monitoring the Epitaxial Process. The QCS-7000 Series System is used by four of the "Big 6" wafer manufacturers.
The QCS-7000 is the only non-contact, non-destructive, fast throughput, reliable system available that can measure doping concentrations, near-surface recombination lifetime and depletion widths
NON-DESTRUCTIVE TECHNOLOGY...
The QCS-7000 incorporates the proprietary SCP technique using ac-Surface Photo-Voltage technology to non-destructively measure doping concentration and near-surface recombination lifetime on as-grown Epitaxial wafers. This means production wafers can be measured and then shipped to customers with confidence.
The QCS-7000 is the only production ready tool that is both non-contact and non-destructive. QC Solutions has the solution now.
DESIGNED FOR MANUFACTURING ENVIRONMENTS...
The QCS-7000 was designed to support the needs of high volume wafer manufacturing facilities and wafer fabs. The easy-to-use system is stable, highly reliable and offers full hands-off automation.
And what's more, measurements can be made in a fraction of the time required for existing C-V techniques, without any chemical pre-treatment. Manufacturing costs are reduced and the workplace is safer.
CORRELATES TO CURRENT C-V PROCESSES...
The QC Solutions team recognizes that you have to meet customer quality standards and that C-V measurements are key measures. To ensure that customer specifications and delivery times are met, QC Solutions provides you with the software necessary to create, maintain and apply calibrations between the QCS-7000 and the C-V process in use.
ELIMINATE C-V MEASUREMENTS AND REDUCE WAFER SCRAP...
The power of the QCS-7000 resides in its proprietary SCP technology which allows highly precise non-contact, non-destructive wafer measurement. Sacrificial wafers are eliminated, which means thousands of wafers per year in added revenue.
ELIMINATION OF CHEMICAL PRE-TREATMENT PROCESS...
The QCS-7000 eliminates the need for chemical pre-treatment processing to measure doping concentration or near-surface recombination. Chemical purchases, environmental issues and labor costs are significantly reduced. The workplace is safer, the bottom line improved.
INCREASE IN EPI REACTOR UTILIZATION...
The QCS-7000 will increase the uptime of your Epi reactor. Typically, Epi wafer manufacturers keep the reactor idle while awaiting C-V test results in order to minimize wafer scrap. Since most C-V measurements run between 15 and 30 minutes, and QCS-7000 full wafer measurements only take a few minutes, the results speak for themselves.
QC Solutions, Inc., 101 Billerica Ave., Bldg. 5, North Billerica, MA 01862. Tel: 978-313-0300; Fax: 978-313-0306.