PVD System
Source: Veeco Instruments Inc.
The Cymetra II Planetary PVD System allows deposition of up to six materials with leading edge planetary technology
The Cymetra II Planetary PVD System allows deposition of up to six materials with leading edge planetary technology. This system provides precise sub-angstron thickness control, maximum uniformity and repeatability, making it suitable for advanced processes such as GMR sensors and future generation multilayer applications.
The product's cluster tool platform allows the combination of ion beam etch, ion beam deposition and physical vapor deposition for advanced GMR manufacturing. The use of multiple modules permits deposition of up to 10 different materials in one cluster tool.
Veeco Instruments, Inc., Terminal Drive, Plainview, NY 11803. Tel: 516-349-8300. Fax: 516-349-8321.
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